Micromachining of polyurethane (PU) polymer using a KrF excimer laser (248nm)
نویسندگان
چکیده
منابع مشابه
Excimer laser microfabrication and micromachining
Excimer lasers are proving to be highly successful for fabricating industrial components with feature sizes in the range between 0.05–1,000μm (see Fig. 1). As well as providing a 15 year, 5 generation extension to optical lithography as used in the manufacture of silicon chips, excimer lasers are used for microfabricating many of the critical features in a wide variety of the electronic and tel...
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In the present work, the surface microtexture and chemical changes induced in human dentin by laser processing with KrF excimer laser radiation using fluences ranging from 0.5 to 20 J/cm2 were studied by SEM, XPS and FTIR. Two distinct behaviours were observed in the evolution of surface topography. In some samples, the laser-treated surface remained flat, independently of the fluence used. It ...
متن کاملAnalysis of photodecomposition of gaseous chlorobenzene by KrF excimer laser.
Gaseous monochlorobenzene was irradiated with KrF excimer laser (248 nm) under reduced pressure. The photodecomposition was an apparent first order reaction. When the system contained no additive gas, the photolysis was found to give benzene (conversion yield: 49%) in the gas phase and many unidentified products in the solid phase. On the other hand, in the presence of oxygen, carbon dioxide (1...
متن کاملExcimer laser fabrication of polymer microfluidic devices
Silicon has been a primary material for fabrication of microelectromechanical systems ~microfluidic devices in MEMS! for several decades. This is due to the fact that the MEMS techniques were derived from those used for microfabrication in the semiconductor industry. These techniques are well developed, and can be readily applied for silicon based MEMS fabrication. Nowadays, alternative manufac...
متن کاملExcimer Laser Micromachining of Polymers using Half-tone Masks: Mask Design and Process Optimization
Laser micromachining by projection with half-tone masks is a useful technique for fabricating microstructures with stepped multi-level or continuous surface relief. However, design of the mask transmission function to achieve a particular surface profile is a non-trivial problem except when the surface relief is shallow compared to the focal depth of the projection optics. In this paper we desc...
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ژورنال
عنوان ژورنال: Applied Surface Science
سال: 2014
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2014.09.183